Metal Etching System

ItemSpecification
Applicable Workpiece6~8 inch wafer cleaning
Batch Capacity25 pcs/batch for 8 inch
Process FlowCu etching → QDR → Ti etching → QDR → Au etching → QDR
Process Tank FunctionsCirculation filtration + Heating/Cooling + Up-down oscillation + Basket lifting
Main MaterialsMetal frame + PVC/PPW shell plate, tank made of PPN/PVDF material
Transfer MethodManual transfer
Cycle TimeAdjustable from 5~15 minutes according to process requirements

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